ALD
ALD Film
- High-k dielectrics
- (AI2O3, HfO2, ZrO2, Ta2O5, La2O3)
- Transistor gates, DRAM capacitors
- Organic transistors, Graphene, Graphite, Nano-tubes, Nano-wires, Molecular electronics
- Conductive gate electrodes
- (Ir, Pt, Ru, TiN, TaN)
- Metal interconnects and liners
- (Cu, WN, TaN, WNC, Ru, Ir)
- Metallic diffusion barrier layers for Cu interconnects and semiconductor vias transistor gate and
memory cell applications, Passivation layers
- Catalytic materials
- (Pt, Ir, Co, TiO2, V2O5)
- Coatings inside filters, membranes, Catalysts, Fuel cells ion exchange coatings
- Nanostructures
- Conformal deposition around and inside nanostructures and MEMS
- Biomedical coatings
- (TiN, ZrN, CrN, TiAlN, AlTiN)
- Biocompatible materials for in-vivo medical devices and instruments
- ALD metals
- (Ru, Pd, Ir, Pt, Rh, Co, Cu, Fe, Ni)
- Transparent electrical conductors
- (ZnO:Al, ITO)
- UV blocking layers
- (ZnO, TiO2)
- OLED passivation
- (Al203)
- Solid lubricant layers
- (WS2)
- Photonic crystals
- (ZnO, ZnS:Mn, TiO2, Ta2N5)
- Coatings inside porous alumina, inverted opals
- Anti-reflection and optical filters
- (Al2O3, ZnS, SnO2, Ta2O5)
- Fabry-Perot, Rugate, Flip-Flop optical filters
- Electrolminescent devices
- (SrS:Cu, ZnS:Mn, ZnS:Tb, SrS:Ce)
- Processing layers
- (Al2O3, ZrO2)
- Etch barriers, ion diffusion barrlers, fill layers for magnetic read heads
- Optical applications
- (AlTiO, SnO2, ZnO)
- Photonics, Nano-photonics, Solar cells, Integrated Optical coatings, Lasers, Variable dielectric
constant nano-laminates
- Sensors
- (SnO2, Ta2O5)
- Gas sensors, pH sensors
- Wear and corrosion inhibiting layers
- (Al2O3, ZrO2)