ALD
Atomic-Shell
Thermal ALD Procee
- System Specification
- Reactor Volume : 100 cc ~ 500 cc
- Filter Size : Variable (0.5 µm~ )
- Reactor Heating : Max 300 ℃
(Reactor Body : more than 230 ℃) - Reactor rotation : DC Motor Driver
- Rotation speed : 10 ~ 60 rpm
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- Atomic Shell
- Detail