Others
Canisters
- CN1 supplies various types of canister which contains liquid chemicals for ALD- and CVD-related processes in semiconductor-based industries
Product information
Product Type
- Feature & Advantages
- Volume : 1~200 liter
- 316L stainless body with EP treatment
- Maximum safety and cost efficient
- Hydraulic pressure : 300kPa
- Leak rate : under 2.0×10-9 mbar·l/sec
Feature & Advantages
| Class | Specification |
|---|---|
| Transfer type | DLI(Direct Liquid Injector) for LDS |
| Valve type | 1/4″ Pneumatic diaphragm valve |
| Gasket | Teflon or Metal |
| Inlet/Outlet port | 1/4″ Male VCR |
| Refill port | 1/4″ or 1/2″ Male VCR |
| Purge valve | Option |
| Level sensor | Option |